Vacuum Deposition of Thin Films

Fülszöveg

The préparation of solid thin films by the technique of vacuum evaporation »and, in certain cases, by cathodic sputtering Bhas steadily been growing in industry and Brescar ch. In spite of the ad vanees in the de-H velopment of thin film technology, however, no comprehensive work exists dealing with feboth déposition procédures and the physical : properties of thin films which can serve both as a reference book and guide to the inter-W, ested worker.
The author, who has been engaged for P some years on the development of coating R'plant and investigations into déposition tech-p, nique, has attempted with this book to fili r;. the deficiency. It was obviously impossible to H deal in detail with ali the numerous applica-K tions of thin films, and the main subject-matter has been planned to cover plant
¦ design, film production, and the physical K properties of thin films, ail of which are of E fundamental importance irrespective of the K. particular purpose for which the film is... Tovább

Fülszöveg

The préparation of solid thin films by the technique of vacuum evaporation »and, in certain cases, by cathodic sputtering Bhas steadily been growing in industry and Brescar ch. In spite of the ad vanees in the de-H velopment of thin film technology, however, no comprehensive work exists dealing with feboth déposition procédures and the physical : properties of thin films which can serve both as a reference book and guide to the inter-W, ested worker.
The author, who has been engaged for P some years on the development of coating R'plant and investigations into déposition tech-p, nique, has attempted with this book to fili r;. the deficiency. It was obviously impossible to H deal in detail with ali the numerous applica-K tions of thin films, and the main subject-matter has been planned to cover plant
¦ design, film production, and the physical K properties of thin films, ail of which are of E fundamental importance irrespective of the K. particular purpose for which the film is Rrequired.
To quote the Foreword by Professor S. B-Tolansky: "There is in fact a crying need for P an adequate summary of technical procédures ¦such as has been gathered here by Mr. Hol-
¦ land. The reader will not find this a theo-¦retical treatise on thin films. That subject is ¦formidable enough and has produced a vast K literatura, yet he will find that this book is Bmost admirably documented. Mr. Holland Bcertainly knows the literature and is right up
to date in ail essentials. The book contains a good deal of original information and it is my ¦considered opinion that it is a valuable con-
¦ tribution to the subject." Vissza